Pressure range:•1×10^-6Pa~1.2×10^5Pa (Bellow seal)•1×10^-5Pa~1.2×10^5Pa (Viton O-ring sealed)Leak rate of valves' body and base:•≤1.3×10-7Pa·L·s-1 Cycles until first service: •200,000 timesPosition of installation:•Any directionBaking temperate of valve bodies:•≤150℃
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